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研磨方法および研磨装置
专利权人:
株式会社荏原製作所
发明人:
渡邉 博光,山口 都章,小畠 厳貴,和田 雄高
申请号:
JP20130220327
公开号:
JP6140051(B2)
申请日:
2013.10.23
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
A polishing method of polishing a substrate while preventing coarse particles from being discharged onto a polishing pad is disclosed. In this polishing method, a substrate is brought into sliding contact with a polishing pad while a polishing liquid, which has passed through a filter, is supplied onto the polishing pad. The polishing method includes: passing the polishing liquid through the filter while increasing a physical quantity of the polishing liquid until the physical quantity reaches a predetermined set value, the physical quantity being one of flow rate and pressure of the polishing liquid; and polishing the substrate W on the polishing pad while supplying the polishing liquid that has passed through the filter onto the polishing pad.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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