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ドレッシング装置、該ドレッシング装置を備えた研磨装置、および研磨方法
专利权人:
株式会社荏原製作所
发明人:
永井 聡,小倉 大,濱浦 薫
申请号:
JP20130102970
公开号:
JP6121795(B2)
申请日:
2013.05.15
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
A dressing apparatus capable of bringing an overall dressing surface of a dresser into uniform sliding contact with a polishing surface of a polishing pad and capable of uniformly dressing the overall polishing surface of the polishing pad is disclosed. The dressing apparatus includes a dresser configured to rub against a polishing surface to dress the polishing surface that is used for polishing a substrate, a dresser shaft that applies a load to the dresser, at least one load-applying device configured to apply a downward load to a part of a peripheral portion of the dresser, and an operation controller configured to control operation of the load-applying device.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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