PROBLEM TO BE SOLVED: To provide a thin film deposition system for forming a thin film (particularly an apatite thin film) on a hard tissue such as a bone and a tooth.SOLUTION: A thin film deposition system includes: a laser irradiation means 2 which irradiates laser selected from either Er-YAG laser, Er-Cr-YSGG laser, Nd-YAG laser, or semiconductor laser, from an irradiation nozzle 5 a target member 3 which receives the irradiation of the laser from the laser irradiation means 2 a target holding means 4 which holds the target member 3. The target holding means 4 holds the target 3 in such a way that a part or total of a tip edge 7 of the irradiation nozzle 5 is separated from the target member 3 by 0.2-20 mm and the target member 3 is set at an angle at which a material scattering from the target member 3 is deposited on an object, by colliding the laser irradiated from the irradiation nozzle 5 to the target member 3.
