荷電粒子線装置及び荷電粒子線装置における軌道修正方法

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专利权人:

株式会社日立ハイテクノロジーズ

发明人:

土肥 英登,池上 明,数見 秀之

申请号：

JP20130011241

公开号：

JP6134145(B2)

申请日:

2013.01.24

申请国别(地区):

日本

年份:

2017

代理人:

摘要：

There is provided a charged particle beam apparatus that includes a trajectory monitoring unit which is disposed above an objective lens (14) and which includes an optical element (12) having a lens action and a trajectory correcting deflector (10). An applied voltage and an excitation current of the optical element (12) are set to zero after a trajectory correction of a primary charged particle beam (30). Accordingly, the lens action and an aberration of the optical element (12) have no influence on resolution.

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