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銅化合物、薄膜形成用原料及び薄膜の製造方法
专利权人:
株式会社ADEKA
发明人:
吉野 智晴,遠津 正揮,桜井 淳,西田 章浩,岡部 誠
申请号:
JP20140100611
公开号:
JP6278827(B2)
申请日:
2014.05.14
申请国别(地区):
日本
年份:
2018
代理人:
摘要:
This invention provides a copper compound represented by General Formula (I) below. In General Formula (I), R 1 to R 3 independently represent a linear or branched alkyl group with a carbon number of 1 to 5; provided that R 1 and R 2 are a methyl group, R 3 represents a linear or branched alkyl group with a carbon number of 2 to 5; and provided that R 1 is a methyl group and R 2 is an ethyl group, R 3 represents a methyl group or a linear or branched alkyl group with a carbon number of 3 to 5. A starting material for forming a thin film of the present invention includes the copper compound represented by General Formula (I). The present invention can provide a copper compound which has a low melting point, can be conveyed in a liquid state, has a high vapor pressure, and is easily vaporizable, and also a starting material for forming a thin film which uses such a copper compound.
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