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基板加熱機構、成膜装置
专利权人:
株式会社アルバック
发明人:
宮口 有典,増田 健,小田島 暢洋,鄒 弘綱
申请号:
JP20130088505
公开号:
JP6108931(B2)
申请日:
2013.04.19
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a substrate heating mechanism which uniformly heats a surface of a substrate and forms a functional film having uniform characteristics on the surface, and to provide a film formation device and a susceptor.SOLUTION: A protrusion 23, which is erected perpendicular to one surface 52a and surrounds a periphery E of a substrate 5 placed on the one surface 52a side, is integrally formed with a susceptor body 21 at the one surface 52a side of the susceptor 52. An inner peripheral surface 23a of the protrusion 23, which faces at least the periphery E of the substrate 5 and spreads along a substantially perpendicular direction, forms a heat reflection surface H which reflects heat. In order to use the inner peripheral surface 23a of the protrusion 23 as the heat reflection surface H, a metal film 22 is formed on an entire inner surface of a recessed part 24 forming the susceptor 52.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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