成膜用粉末及び成膜用材料

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专利权人:

日本イットリウム株式会社

发明人:

佐藤 龍一,深川 直樹,重吉 勇二,松倉 賢人

申请号：

JP20160524155

公开号：

JP6128362(B2)

申请日:

2016.02.02

申请国别(地区):

日本

年份:

2017

代理人:

摘要：

This powder for film formation contains an oxyfluoride of a rare earth element (Ln-O-F). The average particle diameter (D50) of this powder is from 0.1 μm to 10 μm (inclusive), and the volume of pores having a diameter of 10 μm or less as determined by a mercury intrusion method is from 0.1 cm3/g to 0.5 cm3/g (inclusive). In an X-ray diffraction measurement of this powder using a Cu-Kα ray or a Cu-Kα1 ray, the ratio of the maximum peak intensity (S0) of an oxide of a rare earth element (LnxOy) as observed within the range of 2θ = 20-40° to the maximum peak intensity (S1) of the oxyfluoride of a rare earth element (Ln-O-F) as observed within the same range, namely S0/S1 is 1.0 or less.

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