A method of performing an optical examination on a test object and an optical examination device (100). The method includes obtaining (S22) a first detection light quantity distribution that is a detection light quantity distribution obtained for each of a plurality of optical models (1, 2, 3, 4, 5, 6, 7, 8) that simulate the test object, obtaining (S23), using the optical sensor (10), a second detection light quantity distribution that is a distribution of an amount of light detected on the test object, and selecting (S24, S54) based on the first light quantity distribution and the second detection light quantity distribution, an optical model suited to the test object from the plurality of optical models (1, 2, 3, 4, 5, 6, 7, 8). The optical examination device (100) includes an optical sensor (10), and a control system (1001) to control the irradiation system to obtain an amount of light detected by the detection system.
