Okito YAMASHITA;Takeaki SHIMOKAWA;Toshihiro ISHII;Yoichiro TAKAHASHI;Satoru SUGAWARA;Masaaki SATO
发明人:
Toshihiro Ishii,Yoichiro TAKAHASHI,Satoru SUGAWARA,Takeaki SHIMOKAWA,Okito YAMASHITA,Masaaki SATO
申请号:
US14913754
公开号:
US20160242647A1
申请日:
2014.09.26
申请国别(地区):
US
年份:
2016
代理人:
摘要:
An optical sensor includes an irradiation system including at least one light irradiator to irradiate light onto an object under test; and a detection system detecting the light that is irradiated from the irradiation system and is propagated in the object under test. Further, the light irradiator irradiates non-parallel plural light beams on a same position of the object under test.