PROBLEM TO BE SOLVED: To provide a noble metal-oxide thin film material having high heat-resistance which can be used as an electronic conductor in a high-temperature environment of 1,000°C or more.SOLUTION: A noble metal-oxide thin film material having high heat-resistance includes: a substrate consisting of sapphire, single crystal ZrO(with an addition of YO), or sintered ZrO(with an addition of YO); and a composite thin film which is formed on a surface of the substrate and includes fine particles containing oxides including a rare-earth element dispersed in a matrix consisting of a noble metal element. Furthermore, a coating film consisting of ZrO(with an addition of YO) may be formed on a surface of the composite thin film, preferably.
