PROBLEM TO BE SOLVED: To provide an ultrasonic device including an ultrasonic sensor of capacity detection type that has a cavity between the electrodes for vibrating the membrane capable of improving the transmission sound pressure while improving the receiving sensitivity.SOLUTION: The ultrasonic device has a capacitive ultrasonic transducer cell 20 formed including: a base plate 1； multiple support patterns 3 arranged on the base plate 1； and a first electrode 7, a cavity 5, and a second electrode 8 that are formed in order in a direction perpendicular to the side face of each support pattern 3. Here, the vibration surface of a membrane 9 including the second electrode 8 is inclined with respect to the upper surface of the base plate 1.SELECTED DRAWING: Figure 2COPYRIGHT: (C)2020,JPO&INPIT【課題】電極間に空洞部を有し、メンブレンを振動させる容量検出型の超音波センサを含む超音波装置の送信音圧の向上、および、受信感度の向上を実現する。【解決手段】基板１と、基板１上に複数並ぶ支持パターン３と、各支持パターン３の側面に対して垂直な方向に順に形成された第１電極７、空洞部５、第２電極８を備えた静電容量型超音波トランスデューサのセル２０とを形成する。ここで、第２電極８を含むメンブレン９の振動面は、基板１の上面に対して傾斜を有している。【選択図】図２
