PROBLEM TO BE SOLVED: To improve a performance of an ultrasonic inspection device containing a capacity detection type ultrasonic sensor having a cavity part between electrodes and making a membrane to oscillate.SOLUTION: A cell 2 as an electrostatic capacitance type having a lower electrode 8 laminated in a vertical direction, and an upper electrode 6 in a cavity part 10 and a membrane 12 in one semiconductor chip, and a capacitor 5 having the lower electrode 8 and the upper electrode 7 laminated in the vertical direction are formed. The cell 2 and the capacitor 5 are connected in parallel, and when transmitting and receiving a supersonic wave by using the cell 2, a connection between a DC bias power supply and the semiconductor chip is disconnected, and a DC voltage is applied to the cell 2 from the capacitor 5.SELECTED DRAWING: Figure 2COPYRIGHT: (C)2020,JPO&INPIT【課題】電極間に空洞部を有し、メンブレンを振動させる容量検出型の超音波センサを含む超音波検査装置の性能を向上させる。【解決手段】１つの半導体チップに、縦方向に積層された下部電極８、空洞部１０およびメンブレン１２内の上部電極６を備えた静電容量型デバイスであるセル２と、縦方向に積層された下部電極８および上部電極７を備えたコンデンサ５を形成する。セル２とコンデンサ５とは並列接続されており、セル２を用いて超音波の送受信を行う際には、ＤＣバイアス電源と半導体チップとの接続を遮断し、コンデンサ５からセル２に直流電圧を印加する。【選択図】図２
