In a method for producing a capacitive micromachined ultrasonic transducer having a cell of a structure having a first electrode and a vibration membrane containing a second electrode provided with a cavity interposed between the first electrode and the second electrode, a first sacrificial layer is formed on the first electrode. A second sacrificial layer is formed on a portion corresponding to a part of a cavity is formed on the first sacrificial layer, and then an insulating layer configuring a part of the vibration membrane is formed on the second sacrificial layer. The second sacrificial layer is removed by etching through an opening formed in the insulating layer, and then a part of the first sacrificial layer is removed.
