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CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD FOR MANUFACTURING THE SAME
专利权人:
发明人:
申请号:
EP06746754.8
公开号:
EP1897498B1
申请日:
2006.05.23
申请国别(地区):
EP
年份:
2015
代理人:
摘要:
A capacitive micromachined ultrasonic transducer (cMUT) is constituted by a plurality of transducer elements comprising plural transducer cells that are mutually connected in parallel and comprises: a silicon substrate a bottom electrode placed on the top surface of the silicon substrate an upper electrode placed opposite to the bottom electrode and apart therefrom by a prescribed air or vacuum a membrane for supporting the bottom electrode and a membrane supporting part for supporting the membrane, wherein the cMUT comprises a third electrode which has an electrical continuity to the bottom electrode and which corresponds to either one of the transducer cells of a prescribed number of the transducer subelement or of the transducer elements, and a fourth electrode which is a ground electrode electrically connected to the bottom electrode.
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