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Capacitive ultrasonic transducer and endo cavity ultrasonic diagnosis system using the same
专利权人:
发明人:
申请号:
EP11001279.6
公开号:
EP2335595B1
申请日:
2005.10.20
申请国别(地区):
EP
年份:
2012
代理人:
摘要:
A capacitive ultrasonic transducer (c-MUT) comprising a silicon substrate and a transducer element which comprises transducer cells, each of which is constituted by a first electrode equipped on the top surface of the silicon substrate, a second electrode placed opposite to the first electrode with a predetermined gap therefrom and a membrane for supporting the second electrode, wherein a trench is equipped between the adjacent transducers and a conductive film is formed in the trench.
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