Capacitive ultrasonic transducer and endo cavity ultrasonic diagnosis system using the same

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专利权人:

Hideo Adachi

发明人:

Hideo Adachi,Katsuhiro Wakabayashi,Akiko Mizunuma,Atsushi Osawa,Tatsuo Kaimai,Shinji Yasunaga,Kiyoshi Nemoto,Miyuki Murakami,Kousei Tamiya,Yu Kondo

申请号：

US13040922

公开号：

US08930169B2

申请日:

2011.03.04

申请国别(地区):

US

年份:

2015

代理人:

摘要：

A capacitive ultrasonic transducer (c-MUT) comprising a silicon substrate and a transducer element which comprises transducer cells, each of which is constituted by a first electrode equipped on the top surface of the silicon substrate, a second electrode placed opposite to the first electrode with a predetermined gap therefrom and a membrane for supporting the second electrode, wherein a trench is equipped between the adjacent transducers and a conductive film is formed in the trench.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/