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形状測定装置、構造物製造システム、形状測定方法、構造物製造方法、形状測定プログラム、及び記録媒体
专利权人:
株式会社ニコン
发明人:
中村 裕
申请号:
JP20150527329
公开号:
JP6128219(B2)
申请日:
2014.07.17
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
The purpose of the present invention is to more quickly and easily measure the shape of an object to be measured. A shape measurement device includes: a probe including a projection optical system that projects a line-shaped pattern onto a surface of the object to be measured or projects a spot pattern while scanning in at least a linear scanning range, and an image capturing device that detects an image of the pattern projected onto the object to be measured; a movement mechanism that rotates the object to be measured and the probe relative to each other so that the object to be measured rotates relative to the probe around a rotation axis and moves at least one of the probe and the object to be measured relatively in a direction that intersects with a rotation direction in which the object to be measured rotates; a measurement region setting unit that sets a measurement region of the object to be measured; and an actual measurement region setting unit that sets an actual measurement region including an actu
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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