您的位置: 首页 > 农业专利 > 详情页

形状計測方法、形状計測装置、プログラム及び記録媒体
专利权人:
キヤノン株式会社
发明人:
前田 充史
申请号:
JP20130029575
公开号:
JP6080592(B2)
申请日:
2013.02.19
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
The present invention is directed to more accurately acquiring shape data than conventional techniques. After an imaging unit images an interference fringe, a calculation unit acquires the captured image from the imaging unit. The calculation unit extracts a ring zone region where the interference fringe is sparse in the captured image from each captured image, and calculates a phase distribution of the interference fringe in each ring zone region. The calculation unit acquires a deviation component having an orientation and an amount both unchangeable along a circumferential direction of a circle centered at the optical axis of the subject light by analyzing the interference fringe contained in each acquired captured image. Further, the calculation unit calculates positions of characteristic points of a calibrator, and calculates a distortion component. Then, the calculation unit calculates the shape data corrected based on the deviation component and the distortion component.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

意 见 箱

匿名:登录

个人用户登录

找回密码

第三方账号登录

忘记密码

个人用户注册

必须为有效邮箱
6~16位数字与字母组合
6~16位数字与字母组合
请输入正确的手机号码

信息补充