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金属酸化物半導体膜、薄膜トランジスタおよび電子デバイス
专利权人:
富士フイルム株式会社
发明人:
高田 真宏
申请号:
JP20160556442
公开号:
JP6257799(B2)
申请日:
2015.09.28
申请国别(地区):
日本
年份:
2018
代理人:
摘要:
Provided are: a method for producing a metal oxide semiconductor film, which is capable of simply forming an oxide semiconductor film having high semiconductor characteristics at low temperatures and at atmospheric pressure with use of a low-cost material containing no indium that is a rare metal; a metal oxide semiconductor film; a thin film transistor; and an electronic device. This method for producing a metal oxide semiconductor film comprises: a metal oxide semiconductor precursor film formation step wherein a metal oxide semiconductor precursor film is formed by applying a solution, which contains zinc and tin serving as metal components and a solvent, to a substrate; and a conversion step wherein the metal oxide semiconductor precursor film is converted into a metal oxide semiconductor film by irradiating the metal oxide semiconductor precursor film with ultraviolet light, while heating the metal oxide semiconductor precursor film. Not less than 80% of all the metal components in the metal oxide semico
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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