您的位置: 首页 > 农业专利 > 详情页

蒸着ユニット及び真空コーティング装置
专利权人:
アプライド マテリアルズ インコーポレイテッドAPPLIED MATERIALS,INCORPORATED
发明人:
ヘイン ステファン,ホフマン ゲード
申请号:
JP20150144136
公开号:
JP6283332(B2)
申请日:
2015.07.21
申请国别(地区):
日本
年份:
2018
代理人:
摘要:
PROBLEM TO BE SOLVED: To decrease an evaporated material depositing on shielding means and improve yield.SOLUTION: A vacuum coating apparatus 100 for coating a web includes a first rotatable coating drum 11 and a second rotatable coating drum 12 disposed parallel to the first drum 11 with a gap 17 formed between the first and second coating drums 11, 12 for transporting at least one web 15. A first evaporator 21 has at least one evaporation source 21a for generating a first evaporation beam 31b, and the first evaporator 21 is arranged next to the first coating drum 11. A second evaporator 22 has at least one evaporation source 22a for generating a second evaporation beam 32b, and the second evaporator 22 is arranged next to the second coating drum 12. The first and second evaporators 21, 22 are inclined relative to each other.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

意 见 箱

匿名:登录

个人用户登录

找回密码

第三方账号登录

忘记密码

个人用户注册

必须为有效邮箱
6~16位数字与字母组合
6~16位数字与字母组合
请输入正确的手机号码

信息补充