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成膜方法、成膜装置、光電極の製造方法および色素増感太陽電池の製造方法
专利权人:
積水化学工業株式会社
发明人:
功刀 俊介,藤沼 尚洋,中嶋 節男
申请号:
JP20130165535
公开号:
JP6122730(B2)
申请日:
2013.08.08
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a film deposition method, a film deposition apparatus, a photoelectrode, and a dye-sensitized solar cell, capable of efficiently depositing a porous film composed of inorganic particles having clean surfaces.SOLUTION: (1) There is provided a film deposition method of depositing a porous film composed of inorganic particles on a base material to be processed by blowing aerosol including inorganic particles and an oxidizing gas to the base material to be processed. (2) The film deposition method includes generating the aerosol by mixing the inorganic particles dispersed in a carrier gas with the oxidizing gas. (3) The film deposition method includes adjusting the time for which the inorganic particles and the oxidizing gas come into contact with each other in the aerosol by adjusting the length of a transport pipe for transporting the aerosol. (4) The film deposition method includes cleaning the inorganic particles with the oxidizing gas in the aerosol. (5) The film deposition m
来源网站:
中国工程科技知识中心
来源网址:
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