PROBLEM TO BE SOLVED: To provide an apparatus such as a probe in which a gap between a frame of the apparatus and an edge of a device substrate can be made narrow by devising the arrangement of a folded part of a flexible wiring board.SOLUTION: An apparatus comprises: a substrate 101 on which devices are arrayed an electrode terminal connected to the devices, respectively, and formed at an edge of a side of the substrate 101 and a flexible wiring board 102 disposed on a surface of the substrate 101 opposite to the surface on which the devices are formed, and including wiring. The electrode terminal and the wiring are electrically connected by a connection part 108. The flexible wiring board 102 is folded in a direction away from the surface of the substrate 101 opposite to the surface on which the devices are formed, along an edge of a side of the substrate 101 different from the side where the connection part 108 is formed.COPYRIGHT: (C)2014,JPO&INPIT【課題】フレキシブル配線基板の折り曲げ部の配置を工夫することで、装置の枠とデバイス基板の縁部の隙間を狭くすることができる探触子などの装置を提供する。【解決手段】装置は、デバイスが配列された基板101と、デバイスにそれぞれ接続され基板101の辺の縁部に形成された電極端子と、基板101のデバイス形成面と反対の面側に配置され配線を備えたフレキシブル配線基板102を有する。接続部108により、電極端子と配線は電気的に接続される。フレキシブル配線基板102は、接続部108の形成された辺とは異なる基板101の辺の縁部に沿って、基板101のデバイス形成面と反対の面から遠ざかる方向に折リ曲げられている。【選択図】図2
