PROBLEM TO BE SOLVED: To solve such a problem that variations in the conversion characteristics are likely to occur, when the I/O wiring of electric signal of each signal is led out from each element to the connection pad on the periphery of an element substrate.SOLUTION: A circuit section of an electromechanical conversion device includes a circuit board bonded to the surface of an element section on the side opposite from an element substrate, a plurality of second connection terminals formed on the circuit board, and a plurality of second wiring parts for electrically connecting a plurality of first connection terminals formed on the rear surface of the element substrate with the second connection terminals, respectively. The plurality of second connection terminals are formed on the surface of the circuit board opposite from the surface to which the element substrate is bonded. Each of the plurality of second wiring parts passes through a through hole, formed in the circuit board for each first connection terminal, and electrically connects the first connection terminal and the second connection terminal.COPYRIGHT: (C)2013,JPO&INPIT【課題】 素子毎の電気信号を入出力する配線を各素子から素子基板の周辺部の接続パッドまで引き出す場合、素子毎に変換特性のばらつきが生じやすい。【解決手段】 本発明の電気機械変換装置の回路部は、素子部の素子基板の前記反対側の面と接合された回路基板と、前記回路基板に形成された複数の第二の接続端子と、前記素子基板の裏面に形成された複数の第一の接続端子と前記第二の接続端子とを夫々電気的に接続する複数の第二の配線と、を有し、前記複数の第二の接続端子は、前記回路基板の前記素子基板が接合された面とは反対側の面に形成され、前記複数の第二の配線は夫々、前記回路基板に前記第一の接続端子毎に形成された貫通孔を通り、前記第一の接続端子と前記第二の接続端子とを電気的に接続している。【選択図】 図1
