Grating pattern element, target material measuring apparatus, and target material measuring method

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专利权人:

SAMSUNG ELECTRONICS CO.; LTD.

发明人:

Joonhyung Lee,Sangkyu Kim,Seongho Cho

申请号：

US14809374

公开号：

US09726603B2

申请日:

2015.07.27

申请国别(地区):

US

年份:

2017

代理人:

摘要：

A grating pattern element includes peaks which are periodically arranged and valleys provided between the peaks, and at least one of the peaks and at least one of the valleys includes an adsorbing material on a surface thereof which adsorbs a target material.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/