PROBLEM TO BE SOLVED: To provide a mechanism for preventing air from entering a sterilization chamber.SOLUTION: A sterilization apparatus includes a concentration chamber which concentrates a sterilizer, a vaporization chamber which vaporizes the sterilizer, a measuring pipe into which the sterilizer is introduced from the concentration chamber before being introduced into the vaporization chamber, vacuum equipment which vacuum the sterilizing chamber, and a first valve which is opened and closed so as to control communication between the sterilization chamber and measuring pipe. After the sterilizer is introduced into the measuring pipe from the concentration chamber, the atmosphere contained in the measuring pipe is removed from the measuring pipe by opening the first valve.COPYRIGHT: (C)2013,JPO&INPIT【課題】滅菌室に空気が入らないようにするための仕組みを提供すること。【解決手段】滅菌剤を濃縮する濃縮室と、滅菌剤を気化するための気化室と、前記気化室に投入する前に、前記濃縮室から滅菌剤が投入される計量管と、前記滅菌室を真空引きするための真空機器と、前記滅菌室と前記計量管との導通の制御するために開け閉めする第1弁とを備え、前記濃縮室から滅菌剤を計量管に投入した後に、当該計量管に含まれる大気を、前記第1弁を開けることで、前記計量管から取り除くことを特徴とする。【選択図】図7
