PROBLEM TO BE SOLVED: To provide a mechanism prompting sterilization action while reducing waste of a sterilizer by providing a mechanism for feeding the sterilizer left in a vaporization chamber for gasifying the sterilizer into a sterilization chamber.SOLUTION: A sterilization apparatus includes a first atmosphere opening valve which is opened and closed so as to control communication between the atmosphere and the vaporization chamber for vaporizing the sterilizer before the sterilizer is injected into the sterilization chamber, and after a sterilizing gas vaporized in the vaporization chamber is injected into the sterilization chamber by vacuuming the vaporization chamber with a vacuum pump, the first atmosphere opening valve is opened while the vaporization chamber and sterilization chamber communicate with each other.COPYRIGHT: (C)2013,JPO&INPIT【課題】滅菌剤をガス化する気化室に残留している滅菌剤を滅菌室に送り込む仕組みを設けることで、滅菌剤の無駄を減らしつつも滅菌作用を促す仕組みを提供する。【解決手段】滅菌室に投入する前に滅菌剤を気化するための気化室と大気との導通の制御するために開け閉めする第一大気開放弁を備え、真空ポンプにより気化室を真空引きすることにより気化室内で気化された滅菌剤ガスを滅菌室に投入した後、気化室と滅菌室が導通している状態で、第一大気開放弁を開けて気化室と大気とを導通させる。【選択図】図2
