PROBLEM TO BE SOLVED: To remove a sterilization agent remaining in a path of a sterilization agent efficiently.SOLUTION: A sterilization unit 100 performs sterilization of a sterilization object using a sterilization agent. The sterilization unit comprises: a sterilization chamber 219 for storing the sterilization object a vacuum pump 220 for decompressing the sterilization chamber and a vaporization furnace 216 for supplying the sterilization agent to the sterilization chamber. An arithmetic processing part 201 makes the vaporization furnace and the sterilization chamber communicate each other and supplies the sterilization agent to the sterilization chamber, in a state that the sterilization chamber is decompressed more than the vaporization furnace by the vacuum pump.COPYRIGHT: (C)2015,JPO&INPIT【課題】滅菌剤の経路に残留した滅菌剤を効果的に除去する。【解決手段】滅菌装置100は、滅菌剤を用いて滅菌対象物を滅菌する。滅菌装置は滅菌対象物を収納するための滅菌室219、滅菌室を減圧する真空ポンプ220、および滅菌剤を滅菌室に供給するための気化炉216を有している。演算処理部201は真空ポンプによって滅菌室を気化炉よりも減圧した状態で、前記気化炉と滅菌室とを連通させて滅菌室に滅菌剤を供給する。【選択図】図2
