結晶膜、結晶膜の製造方法、蒸着装置及びマルチチャンバー装置

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专利权人:

株式会社ユーテック

发明人:

木島 健,本多 祐二

申请号：

JP20130154870

公开号：

JP6255647(B2)

申请日:

2013.07.25

申请国别(地区):

日本

年份:

2018

代理人:

摘要：

To improve the single crystallinity of a stacked film in which a ZrO2 film and a Y2O3 film are stacked or a YSZ film. A crystal film includes a Zr film and a stacked film in which a ZrO2 film and a Y2O3 film formed on the Zr film are stacked, and has a peak half-value width when the stacked film is evaluated by X-ray diffraction being 0.05° to 2.0°.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/