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圧力センサ、並びに圧力センサを用いたマイクロフォン、血圧センサ、及びタッチパネル
专利权人:
株式会社東芝
发明人:
岡本 和晃,堀 昭男,福澤 英明,藤 慶彦,湯澤 亜希子
申请号:
JP2014136503
公开号:
JP6212000B2
申请日:
2014.07.02
申请国别(地区):
JP
年份:
2017
代理人:
摘要:
A pressure sensor according to an embodiment includes: a support member a membrane supported by the support and having flexibility and a strain detection element formed on the membrane. The strain detection element includes a first magnetic layer formed on the membrane and having a magnetization, a second magnetic layer having a magnetization, and an intermediate layer formed between the first magnetic layer and the second magnetic layer. A direction of at least one of the magnetization of the first magnetic layer and the magnetization of the second magnetic layer changes relatively to that of the other depending on a strain of the membrane. Moreover, the membrane includes an oxide layer that includes aluminum.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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