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物理的気相堆積用のチャンバ
专利权人:
アプライド マテリアルズ インコーポレイテッドAPPLIED MATERIALS,INCORPORATED
发明人:
ヒンタ—シュスター, ライナー,リッペルト, ローター
申请号:
JP20160005561
公开号:
JP6275755(B2)
申请日:
2016.01.14
申请国别(地区):
日本
年份:
2018
代理人:
摘要:
A chamber (200; 300; 400; 500; 600; 700; 900; 1000) for physical vapor deposition is provided. The chamber includes a housing (210; 310; 410; 510; 610; 710; 910; 1010), a door (220; 320; 420; 520; 620; 720; 920 1100; 1220) for opening and closing the housing; and a bearing (240; 340; 440; 540; 640; 740; 940; 1140; 1240) for receiving a target (230), wherein the bearing is oriented in a first direction (260). Further, the chamber is adapted so that the target is at least partially removable from the chamber in the first direction. According to an embodiment, a chamber (200; 300; 400; 500; 600; 700; 900; 1000,) for physical vapor deposition is provided. The chamber is adapted for receiving at least one target (230) and a substrate. The chamber includes a housing; a door; and at least one bearing for mounting the target, wherein the bearing is attached to the door.
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中国工程科技知识中心
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