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MULTI-LAYER PACKAGING SCHEME FOR IMPLANT ELECTRONICS
专利权人:
California Institute of Technology
发明人:
Yu-Chong Tai,Han-Chieh Chang
申请号:
US14981432
公开号:
US20160133540A1
申请日:
2015.12.28
申请国别(地区):
US
年份:
2016
代理人:
摘要:
The present invention provides a micropackaged device comprising: a substrate for securing a device with a corrosion barrier affixed to the substrate, wherein the corrosion barrier comprises a first thin-film layer, a metal film coating the thin-film layer and a second thin-film layer to provide a sandwich layer; and optionally at least one feedthrough disposed in the substrate to permit at least one input and or at least one output line into the micropackaged device, wherein the micropackaged device is encapsulated by the corrosion barrier. Methods of producing the micropackaged device are also disclosed.
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