PROBLEM TO BE SOLVED: To provide a vacuum cooling device capable of more efficiently performing a drying operation of a vacuum pump.SOLUTION: A vacuum cooling device includes a processing tank 2 for accommodating a cooled object, a vacuum pump 1 for sucking gas in the processing tank, a vacuum path 9 for connecting the processing tank 2 with the vacuum pump 1, a vacuum valve 11 for blocking the vacuum path 9, a vacuum pump air introduction valve 14 for introducing outside air between the vacuum valve 11 and the vacuum pump 1 in the vacuum path 9 and an operation control device 5 for controlling operations of the vacuum pump 1, the vacuum valve 11 and the vacuum pump air introduction valve 14, and cools the cooled object accommodated in the processing tank by vacuumizing inside of the processing tank. The operation control device 5 performs a vacuum pump drying operation for operating the vacuum pump 1 with the vacuum valve 11 closed after completion of vacuum cooling. In the vacuum pump drying operation, after the vacuum pump air introduction valve 14 is intermittently opened/closed, the state where the vacuum pump air introduction valve 14 is opened is maintained.SELECTED DRAWING: Figure 1COPYRIGHT: (C)2018,JPO&INPIT【課題】真空ポンプの乾燥運転をより効率よく行うことのできる真空冷却装置を提供する。【解決手段】被冷却物を収容する処理槽2、処理槽内の気体を吸引する真空ポンプ1、前記処理槽2と真空ポンプ1を繋ぐ真空経路9、真空経路9を遮断する真空弁11、前記真空経路9の真空弁11と真空ポンプ1の間へ外気を導入するための真空ポンプ空気導入弁14、前記の真空ポンプ1や真空弁11、真空ポンプ空気導入弁14の作動を制御する運転制御装置5を持ち、処理槽内を真空化することで処理槽内に収容している被冷却物の冷却を行う真空冷却装置において、前記運転制御装置5では、真空冷却終了後に、真空弁11を閉じた状態で真空ポンプ1の作動を行う真空ポンプ乾燥運転を行うようにしており、真空ポンプ乾燥運転では、真空ポンプ空気導入弁14を間欠的に開閉した後で真空ポンプ空気導入弁14を開いた状態を維持する。【選択図】図1
