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Ultrasonic vibrator, ultrasonic probe, and method of manufacturing ultrasonic vibrator
专利权人:
オリンパス株式会社
发明人:
若林 勝裕
申请号:
JP2016575689
公开号:
JP6141551B2
申请日:
2016.04.04
申请国别(地区):
JP
年份:
2017
代理人:
摘要:
An ultrasound transducer according to the present invention includes: a plurality of piezoelectric elements; a substrate configured to perform input and output of an electric signal with respect to the piezoelectric elements; a plurality of signal input and output electrodes where each signal input and output electrode is provided between each piezoelectric element and the substrate and configured to electrically connect the piezoelectric element with the substrate; a plurality of backing materials where each backing material is provided at each of the piezoelectric elements on a side where the signal input and output electrode is arranged and configured to attenuate a force generated by operation of the piezoelectric element; and a plurality of sealing portions where each sealing portion is configured to seal an outer surface of at least a portion of an electrical path connecting the substrate with the signal input and output electrode. The plurality of piezoelectric elements, the plurality of backing materials, a portion of the substrate, the plurality of signal input and output electrodes, and the plurality of sealing portions are obtained by dividing a forming member along a stacking direction of the forming member, the forming member being formed by stacking a plurality of materials, each of the plurality of materials forming the piezoelectric elements, the backing materials, the portion of the substrate, the signal input and output electrodes, and the sealing portions.
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