金属酸化物薄膜及びその製造方法、並びにその製造方法に用いる金属酸化物薄膜形成用塗布溶液

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专利权人:

富士フイルム株式会社

发明人:

高田 真宏,菊池 信,田中 淳,鈴木 真之

申请号：

JP20130144296

公开号：

JP6134980(B2)

申请日:

2013.07.10

申请国别(地区):

日本

年份:

2017

代理人:

摘要：

A metal oxide thin film according to the present invention has a peak which is attributed to 1s electrons of nitrogen in a binding energy range of 402 eV to 405 eV in an XPS spectrum obtained by X-ray photoelectron spectroscopy, in which peak areas, which are obtained by separation of peaks having a peak energy of a metal-oxygen bond attributed to 1s electrons of oxygen, satisfy the following expression. 0.9

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