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ULTRASONIC TRANSDUCER, BIOLOGICAL SENSOR, AND METHOD FOR MANUFACTURING AN ULTRASONIC TRANSDUCER
专利权人:
SEIKO EPSON CORPORATION
发明人:
Tomoaki NAKAMURA,Hironori SUZUKI
申请号:
US14448407
公开号:
US20150024537A1
申请日:
2014.07.31
申请国别(地区):
US
年份:
2015
代理人:
摘要:
A method for manufacturing an ultrasonic transducer includes: forming a piezoelectric element by laminating a lower electrode, a piezoelectric body, and an upper electrode on a first face of a support film; affixing a reinforcing substrate that covers the piezoelectric element to the first face of the support film; forming a photosensitive resin substrate to a second face of the support film that is on an opposite side from the first face; forming an opening in the resin substrate by irradiating the resin substrate with light; and removing the reinforcing substrate.
来源网站:
中国工程科技知识中心
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http://www.ckcest.cn/home/

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