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Ultrasonic transducer, method for manufacturing ultrasonic transducer, and ultrasonic endoscope
专利权人:
Katsuhiro Wakabayashi
发明人:
Katsuhiro Wakabayashi,Hideo Adachi,Mamoru Hasegawa,Kazuya Matsumoto,Ryo Ohta
申请号:
US11977191
公开号:
US08740800B2
申请日:
2007.10.24
申请国别(地区):
US
年份:
2014
代理人:
摘要:
An ultrasonic transducer according to the invention includes a flexible sheet, a rigid body portion including a lower electrode made of at least a thin-film conductive material on a surface of the flexible sheet, a dividing portion which divides the rigid body portion into segments, and a plurality of transducer elements including the divided rigid body portion, has at least one transducer cell composed of one of the segments, an insulating partition portion bonded to the segment, an air gap portion surrounded by the partition portion, an upper electrode opposed to the lower electrode extending to the partition portion to sandwich the air gap portion therebetween, and an upper insulating layer formed on the upper electrode, and includes an upper protection film which continuously covers a surface portion of the transducer elements and the dividing portion.
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