PROBLEM TO BE SOLVED: To provide an ultrasonic probe in which fatigue failure of a vibrating membrane is less likely to occur.SOLUTION: An ultrasonic probe includes an element chip 17 where a piezoelectric element 23 is installed on a vibrating membrane 43, and a housing for supporting the element chip 17. The piezoelectric element 23 includes a lower electrode 24 formed on the vibrating membrane 43, a piezoelectric membrane 26 formed on the surface of the lower electrode 24, and an upper electrode 25 formed on the surface of the piezoelectric membrane 26. The piezoelectric membrane 26 becomes wider gradually from the upper electrode 25 toward the lower electrode 24 side, and has a substantially trapezoidal profile.COPYRIGHT: (C)2016,JPO&INPIT【課題】振動膜が疲労破壊され難い超音波プローブを提供する。【解決手段】振動膜43上に圧電素子23が設置された素子チップ17と、素子チップ17を支持する筐体と、を備え、圧電素子23は、振動膜43上に形成された下部電極24と、下部電極24上に形成された圧電体膜26と、圧電体膜26の表面に形成された上部電極25と、を備え、圧電体膜26は上部電極25側から下部電極24側へ向かって徐々に幅広となり、その断面形状が略台形形状である。【選択図】図15
