PROBLEM TO BE SOLVED: To provide an ultrasonic device having high frequency accuracy and sensitivity and achieving reduction in crosstalk.SOLUTION: A substrate 44 of an ultrasonic device has a first surface and a second surface 44b opposite to the first surface, and a first opening 46 and a second opening 46 partitioned by a wall 57 from each other. A first vibration membrane and a second vibration membrane are disposed to seal each of the first opening 46 and the second opening 46. A first piezoelectric element and a second piezoelectric element are each disposed on the first vibration membrane 48 and the second vibration membrane 49. A recess 56 opening on the second surface 44b of the substrate 44 is segmented in the wall 57.SELECTED DRAWING: Figure 4COPYRIGHT: (C)2016,JPO&INPIT【課題】周波数精度や感度が高く、かつ、クロストークの低減を実現する超音波デバイスを提供する。【解決手段】超音波デバイスの基板４４は、第１面および反対側の第２面４４ｂを有し、壁部５７で相互に仕切られる第１開口部４６および第２開口部４６を有する。基板４４の第１面には、第１開口部４６および第２開口部４６をそれぞれ塞ぐ第１振動膜および第２振動膜が配置される。第１振動膜４８および第２振動膜４９にそれぞれ第１圧電素子および第２圧電素子とが設けられ、壁部５７には、基板４４の第２面４４ｂに開口する凹部５６が区画される。【選択図】図４
