PROBLEM TO BE SOLVED: To provide a supersonic device, a supersonic probe, and a supersonic device having high transmission reception accuracy.SOLUTION: A supersonic device includes a board 411 having a first face 411C, multiple openings 411A extending in a first direction along the face direction of the first face, and a bulkhead 411B separating the adjoining openings, a diaphragm 412 provided on the first face and closing the opening, multiple walls 421 provided on the opposite side to the board of the diaphragm, and extending in a second direction intersecting the first direction, a transducer 413 provided on the diaphragm, and provided at a position surrounded by the bulkhead and the wall, in the plan view from the thickness direction of the board, and a protrusion 43 provided on the board side of the diaphragm, and extending in the second direction from the bulkhead. The protrusion overlaps the wall in the plan view.SELECTED DRAWING: Figure 7COPYRIGHT: (C)2018,JPO&INPIT【課題】高い送受信精度を有する超音波デバイス、超音波探触子、及び超音波装置を提供する。【解決手段】第一面４１１Ｃを有し、第一面において第一面の面方向に沿う第一方向に延設される複数の開口部４１１Ａと、隣り合う開口部を隔てる隔壁４１１Ｂと、を有する基板４１１と、第一面に設けられ、開口部を閉塞する振動膜４１２と、振動膜の基板とは反対側に設けられ、第一方向に交差する第二方向に向かって延設される複数の壁部４２１と、振動膜に設けられ、基板の厚み方向から見た平面視において、隔壁と壁部とに囲われる位置に設けられる振動子４１３と、振動膜の基板側に設けられ、隔壁から第二方向に向かって延伸する凸部４３と、を有する。凸部は、平面視において壁部と重なる。【選択図】図７
