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ULTRASONIC DEVICE, ULTRASONIC MODULE, ELECTRONIC APPARATUS, AND ULTRASONIC MEASUREMENT APPARATUS
专利权人:
Seiko Epson Corporation
发明人:
Kanechika KIYOSE,Nobuaki HASHIMOTO
申请号:
US15209046
公开号:
US20170020484A1
申请日:
2016.07.13
申请国别(地区):
US
年份:
2017
代理人:
摘要:
An ultrasonic device includes an element substrate, an ultrasonic transducer array disposed on a rear surface of the element substrate, and having a plurality of ultrasonic transducers arranged in an array, an electrode line connected to the ultrasonic transducer on the rear surface of the element substrate, and drawn to a terminal region located outside the ultrasonic transducer array in a planar view of the element substrate viewed from a normal direction, a sealing plate bonded to the rear surface side of the element substrate, and a through electrode penetrating the sealing plate in a thickness direction and connected to an electrode pad of the electrode line at a position, which is located outside a region opposed to the ultrasonic transducer array of the sealing plate and is opposed to the electrode pad.
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