複合酸化物焼結体及び酸化物透明導電膜

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专利权人:

東ソー株式会社

发明人:

倉持 豪人,玉野 公章,飯草 仁志,秋池 良,渋田見 哲夫

申请号：

JP20120262556

公开号：

JP6079175(B2)

申请日:

2012.11.30

申请国别(地区):

日本

年份:

2017

代理人:

摘要：

The present invention provides a complex oxide sintered body 10 wherein Zr/(In + Zr + Y) is 0.05 to 4.5 at% and Y/(In + Zr + Y) is 0.005 to 0.5 at% in an atomic ratio when indium, zirconium, and yttrium are designated by In, Zr, and Y, respectively. Moreover, the present invention provides a sputtering target including the complex oxide sintered body 10 and a transparent conductive oxide film obtained by sputtering the sputtering target.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/