PROBLEM TO BE SOLVED: To provide a plasma generating device which increases an amount of generating active species and also hardly causes dew condensation and moisture deposition on a dielectric film or removes dew condensation or moisture deposited on the dielectric film, and to provide a plasma generating method.SOLUTION: In the plasma generating device which comprises a plasma electrode portion having a pair of electrodes 21 and 22 provided with dielectric films 21a and 22a on opposed faces thereof, and applies a predetermined voltage between the electrodes 21 and 22 to discharge plasma, the device has a structure in which fluid circulation holes are provided in corresponding portions of the electrodes 21 and 22 respectively so as to penetrate each other, and also a heating element 6 is provided in the plasma electrode portion.【課題】活性種の生成量を増やすとともに、誘電体膜に結露や水分付着が起こりにくくする又は誘電体膜に結露又は付着した水分を除去するプラズマ発生装置及びプラズマ発生方法を提供する。【解決手段】対向面に誘電体膜２１ａ、２２ａを設けた一対の電極２１、２２を有するプラズマ電極部を備え、それら電極２１、２２間に所定電圧が印加されてプラズマ放電するものにおいて、各電極２１、２２の対応する箇所にそれぞれ流体流通孔を設けてこれらが貫通するように構成するとともに、プラズマ電極部に発熱体６が設けられている。【選択図】図５
