The present invention provides a delivery device which comprises a substrate, a rigid shell a diaphragm, a cannula, an electrode and an electronic device chamber. The substrate has a first side and a second side. The second side is opposite to the first side. The rigid shell is disposed on the first side of the substrate. A chamber is defined by the rigid shell and the substrate. The diaphragm is configured within the chamber to divide the chamber into an upper reservoir and a lower reservoir. The cannula penetrating through the rigid shell and in fluid communication with the upper reservoir. The electrode is disposed on the first side of the substrate. The electronic device chamber is electrically connecting to the electrode.
