The present invention provides a delivery device which comprises a substrate, a rigid shell a diaphragm, a cannula, an electrode and an electronic device chamber. The substrate has a first side and a second side. The second side is opposite to the first side. The rigid shell is disposed on the first side of the substrate. A chamber is defined by the rigid shell and the substrate. The diaphragm is configured within the chamber to divide the chamber into an upper reservoir and a lower reservoir. The cannula penetrating through the rigid shell and in fluid communication with the upper reservoir. The electrode is disposed on the first side of the substrate. The electronic device chamber is electrically connecting to the electrode.本發明提供一種遞送裝置,其包含一基板、一剛性外殼、一隔膜、一導管、一電極與一電子裝置腔室。該基板具有一第一側與一第二側。該第二側係相對於該第一側。該剛性外殼係設置在該基板第一側上。由該剛性外殼與該基板定義一腔室。該隔膜係經配置於該腔室內,以將該腔室劃分為一上貯槽與一下貯槽。該導管貫穿通過該剛性外殼並與該上貯槽流體連通。該電極設置在該基板第一側上。該電子裝置腔室係電性連接至該電極。