An apparatus and a method for PECVD treatment of a vessel are disclosed. A vessel holder (48) configured for seating to the open end of a vessel (80) is provided. A first gripper (204), configured for selectively holding and releasing the closed end of a vessel and, while gripping the closed end of the vessel, transporting the vessel to the vicinity of the vessel holder, is also provided. A seat on the vessel holder is configured for establishing sealed communication between the vessel holder and the interior space of the vessel. A reactant supply (144) is operatively connected for introducing at least one gaseous reactant within the first vessel through the vessel holder and a plasma generator configured for forming plasma within the vessel under conditions effective to form a reaction product of the reactant on the interior surface of the vessel is provided. There is a vessel release (534) for unseating the vessel from the vessel holder and a gripper (204) which may be the first gripper or another gripper, configured for axially transporting the vessel away from the vessel holder, and then releasing the vessel.
