PROBLEM TO BE SOLVED: To attain highly accurate control of a drying state according to the kind, properties, etc. of dried objects while treating a large quantity of dried objects at a time.SOLUTION: The microwave vacuum dryer 1 includes a vacuum drying furnace 5, an opening/closing door 7, and a pressure reducing device 33. The interior of the vacuum drying furnace 5 is partitioned into a plurality of individual drying chambers 25, and a microwave irradiation device 9, a turntable 37 and a temperature sensor 39 are arranged for each individual drying chamber 25. A drying control state is switched for each individual drying chamber 25 by a control part 31 based on a product temperature measured by the temperature sensor 39, microwave output, and the oscillation time of microwaves.COPYRIGHT: (C)2013,JPO&INPIT【課題】大量の被乾燥物を一度で処理でき、被乾燥物の種類や性状等に対応した精度の高い乾燥状態の制御を可能にする。【解決手段】本発明のマイクロ波減圧乾燥機1は、減圧乾燥炉5と、開閉扉7と、減圧装置33と、を備え、上記減圧乾燥炉5内を複数の個別乾燥室25に区画して、各個別乾燥室25ごとにマイクロ波照射装置9、ターンテーブル37、温度センサ39とを配置し、制御部31によって上記温度センサ39によって計測した品温とマイクロ波出力とマイクロ波の発振時間とに基づいて上記個別乾燥室25ごとに乾燥制御状態を切り替えることができるように構成されている。【選択図】 図1