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APPAREIL D'IMAGERIE
专利权人:
CANON KABUSHIKI KAISHA
发明人:
申请号:
EP15172417.6
公开号:
EP2957218A1
申请日:
2015.06.16
申请国别(地区):
EP
年份:
2015
代理人:
摘要:
An imaging apparatus (100; 200; 300) configured to image an object to be examined (115) is provided. The apparatus includes splitting means (122; 209; 305) configured to split light obtained by combining the returned light and the reference light into a plurality of lights having different polarization components; and detecting means (133, 134; 312, 313) configured to detect the plurality of lights. The apparatus further includes a correcting unit configured to correct a phase difference between different polarization components generated by an optical member provided on an optical path of the measurement light or an optical path of the reference light.
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中国工程科技知识中心
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