PROBLEM TO BE SOLVED: To provide a washing apparatus capable of switching the presence/absence of the pressure reduction boiling and bumping of washing liquid.SOLUTION: After the internal pressure of a washing tank 3 is reduced by pressure reducing means 5, a liquid phase feed valve 18 is opened, and outside air is introduced from the lower part of a washed object 2 to aqueous solution in the washing tank 3 according to a pressure difference inside and outside the washing tank 3. The reduction of the internal pressure of the washing tank 3 by the pressure reducing means 5 is limited to pressure reduction to such an extent that when the aqueous solution in the washing tank 3 is less than a predetermined temperature, the aqueous solution is boiled, and that when the aqueous solution in the washing tank 3 is equal to or more than the predetermined temperature, the aqueous solution is not boiled. When the aqueous solution is boiled, the aqueous solution is bumped by using the bubble as a core according to the following introduction of the outside air to the aqueous solution.COPYRIGHT: (C)2012,JPO&INPIT【課題】洗浄液の減圧沸騰および突沸の有無を切り替えることのできる洗浄装置を提供する。【解決手段】減圧手段5により洗浄槽3内を減圧後、液相給気弁18を開いて、洗浄槽3の内外の差圧により被洗浄物2よりも下方から洗浄槽3内の水溶液中に外気を導入する。減圧手段5による洗浄槽3内の減圧は、洗浄槽3内の水溶液が所定温度未満の場合には、水溶液を沸騰させるが、洗浄槽3内の水溶液が所定温度以上の場合には、水溶液を沸騰させない範囲の減圧に止める。水溶液を沸騰させた場合、その後の水溶液中への外気導入により、その気泡を核として、水溶液を突沸させる。【選択図】図1
