Thomas D. Wang,Haijun Li,Xiyu Duan,Zhen Qiu,Kenn Oldham
申请号：
US15781065
公开号：
US10642027B2
申请日:
2016.12.08
申请国别(地区):
US
年份:
2020
代理人:
摘要：
An optical probe scanning assembly for use in an optical probe includes a mirror assembly that focuses an illumination beam path and a collection beam path at a region of interest within the sample. The illumination beam and the collection beam overlap to form a confocal beam region. The mirror assembly is movable in an x-axis direction and in a y-axis direction to scan the confocal beam region within the sample. The scanning assembly further includes a scanning suspension system including a gimbal assembly connected to the mirror assembly to allow the mirror assembly to rotate about one or more axes. The mirror is thereby adapted to scan along at least two different orthogonal planes, one of which extends vertically into the sample.
