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System and method for scanning a beam of ultra-short pulse light
专利权人:
Wavelight GmbH
发明人:
Vogler, Klaus,Gorschboth, Claudia,Donitzky, Christof
申请号:
AU2013382344
公开号:
AU2013382344B2
申请日:
2013.03.15
申请国别(地区):
AU
年份:
2016
代理人:
摘要:
An embodiment of a scanning optical system (10) comprises: an optical source (22) providing a beam (38) of pulsed light of ultra-short pulse duration; a deflector (26) for deflecting the beam through a scan angle; a lens system including a focusing objective (30) for focusing the deflected beam; a dispersion compensating device (25) for reducing dispersion-related distortion of a pulse of the beam by the lens system, the dispersion compensating device including a deformable, dispersive mirror (42) and an actuator device (44) for the mirror; and a controller (18) for controlling the actuator device to change a shape of the mirror in accordance with the scan angle.
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